| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor superior in durability and having a long life. <P>SOLUTION: The ultrasonic motor comprises a vibrating body 2 on the surface of which a progressive wave is generated by ultrasonic vibration generated by a piezoelectric body 1, and a movable body 3 that abuts on the vibrating body 2 and is driven by the progressive wave. The movable body 3 is constituted of an aluminum alloy, and an aluminum oxide coating having a Vickers hardness of not less than Hv800 and formed by anodic oxidation treatment is applied on at least a friction surface among surfaces of the movable body. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
