| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To detect and discriminate an irregular shape with the size of about several tensμm or smaller having a gently-sloping contour on the rough surface, which cannot be detected or whose shape cannot be discriminated by a conventional optical surface inspection device. <P>SOLUTION: This surface inspection device for inspecting a metal is equipped unitedly with a microwave generator for generating a microwave having the wavelength of 10μm-1 mm or a microwave having a part of the wavelength, the first optical system for guiding the microwave to the measuring object surface, a microwave detector for detecting a reflected wave from the measuring object surface, the second optical system for guiding the reflected wave to the microwave detector, a moving mechanism for the measuring object, and a signal processor for determining a signal intensity distribution by processing a detection signal at each measuring position and determining the surface shape of the metal from the determined signal intensity distribution. The microwave detector is characterized by being installed on a spatially different position from the rear focal position of the second optical system, and by being equipped unitedly with a mechanism for selecting and detecting spatially the microwave. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
