发明名称 Method for fabricating image sensor including isolation layer having trench structure
摘要 The present invention relates to a method for fabricating an image sensor including a device isolation layer having a trench structure. Particularly, an implantation process is performed twice to form two channel stop ion implantation regions in the course of forming the device isolation layer so that a cross-talk phenomenon between neighboring unit pixels is reduced and a leakage current is improved.
申请公布号 US2005176167(A1) 申请公布日期 2005.08.11
申请号 US20030616721 申请日期 2003.07.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE WON-HO
分类号 H01L21/00;H01L27/00;H01L27/146;(IPC1-7):H01L21/00 主分类号 H01L21/00
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