发明名称 |
Transfer robot and inspection method for thin substrate |
摘要 |
A transfer robot ( 5 ) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot ( 5 ), comprising an inspection camera ( 1 ) for detecting the stored state of the thin substrates ( 3 ) in a storage cassette ( 2 ), wherein the plurality of thin substrates ( 3 ) stored in the storage cassette ( 2 ) are carried out from the storage cassette ( 2 ) by the robot.
|
申请公布号 |
US6927181(B2) |
申请公布日期 |
2005.08.09 |
申请号 |
US20040930952 |
申请日期 |
2004.09.01 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI |
发明人 |
WAKIZAKO HITOSHI;SHIRAISHI KAZUNARI;SAGASAKI YUKITO;MOTONAGA KEN-ICHI;HINO KAZUNORI;SANEMASA HIROKI |
分类号 |
B25J13/08;B25J9/04;B25J18/04;B25J19/02;B25J19/04;B65G49/06;B65G49/07;H01L21/00;H01L21/677;H01L21/68;(IPC1-7):H01L31/023 |
主分类号 |
B25J13/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|