<p>A method and apparatus for introducing a fluorine-containing flow stream to a deposition process to maintain process by-product volatility and reduce or eliminate by-product formation and/or interference.</p>
申请公布号
EP1560252(A2)
申请公布日期
2005.08.03
申请号
EP20040258095
申请日期
2004.12.23
申请人
THE BOC GROUP, INC.
发明人
BAILEY, CHRISTOPHER MARK;HOGLE, RICHARD;PURDON, SIMON;KASMALKAR, REVATI PRADHAN;SULLIVAN, AARON;MA, CE;WANG, QING MIN