发明名称 FLOW CONVERSION SYSTEM FOR A MANUFACTURING PROCESS, METHOD FOR CONVERTING A PROCESS FLOW, SYSTEM FOR CONTROLLING MANUFACTURING PROCESS, METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND A COMPUTER PROGRAM PRODUCT
摘要 A flow conversion system for a manufacturing process includes a flow decomposition module decomposing a process in a target process flow into lower processes based on a process decomposition table to create an intermediate lower process flow; a compatible flow generation module replacing the lower processes with a lower compatible process based on a lower process compatibility table to create an intermediate lower compatible process flow; a flow check module creating a lower process flow including all the lower processes available in production facilities from the intermediate and intermediate lower compatible process flows based on an available process table; a flow selection module selecting the lower process flow by calculating an attribute based on an attribute definition table. An external storage unit stores the process decomposition table, the lower process compatibility table, the available process table, and the attribute definition table.
申请公布号 US6925343(B2) 申请公布日期 2005.08.02
申请号 US20040795300 申请日期 2004.03.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATOGUCHI YUICHI;HARAKAWA SHOICHI;ASAMURA TAKESHI;KITAJIMA KOJI
分类号 H01L21/02;G05B19/418;(IPC1-7):G06F19/00 主分类号 H01L21/02
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