| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for inspecting surface defects which detects defects in the surface of a ceramic member by using an optical means, and in particular, to provide an apparatus for inspecting the surface defects, capable of imaging defects such as minute cracks and the like, in order to solve the problems wherein minute defects such as cracking and chipping which occur in the ceramic member, are difficult to find visually, since the contrast of the ceramic member is low, and a red check method currently used as a mainstream method incurs many man-hours and cost. SOLUTION: In the apparatus, an annular light source is arranged as an illumination means above an object to be inspected, and a line sensor is arranged as an imaging means on the axis of the annular light source, and the incidence angle of annular illumination light is set appropriately, thereby detecting the minute defects such as the cracking and chipping which occur in the surface of the ceramic member. COPYRIGHT: (C)2005,JPO&NCIPI
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