| 摘要 |
PROBLEM TO BE SOLVED: To provide a lithium leak detector and a lithium leak detection method for rapidly and highly accurately detecting lithium and lithium compounds. SOLUTION: This lithium leak detector comprises a controller 1 for performing control over respective constituent apparatuses and data processing, a pulse laser oscillator 2 as an irradiation means, a spectroscope 3 for spectrally diffracting light emitted from plasma as detection means, and a detector 4. A laser beam 5 oscillated by the laser oscillator 2 is reflected by a mirror 6 and radiated to a specimen (an object) 8 with its beam diameter adjusted by a lens 7 to a size making it possible to cover an area wanted to be leak-detected. In this event, a beam emitted from the plasma 9 of a surface-deposited substance produced at a laser irradiation position on a surface of the specimen 8 is condensed by a lens 10 and launched into fiber 11. The beam transmitted by the fiber 11 is spectrally diffracted by the spectroscope 3 and measured by the detector 4. COPYRIGHT: (C)2005,JPO&NCIPI
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