发明名称 PROBE GUARD
摘要 <p>A contactor and an object to be tested are electrically connected in a reliable manner without being thermally affected, thus reducing a preheating time and increasing throughput. A probe guard has a contactor; a printed circuit board; an interposer provided between the contactor and the printed circuit board to make them in elastic and electrical contact with each other; a connection member for unitizing the connector, the board, and the interposer; and a reinforcement member for reinforcing the printed circuit board unitized through the connection member.</p>
申请公布号 WO2005069019(A1) 申请公布日期 2005.07.28
申请号 WO2005JP00657 申请日期 2005.01.20
申请人 TOKYO ELECTRON LIMITED;HOSAKA, HISATOMI 发明人 HOSAKA, HISATOMI
分类号 G01R1/073;(IPC1-7):G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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