| 摘要 |
PROBLEM TO BE SOLVED: To provide an atomic force microscope (AFM) for accurately measuring an object under measurement. SOLUTION: This AFM, equipped with a first probe 1a for coarse measurement, a second probe 2a for fine measurement, and a control part for properly using the first and second probes 1a and 2a according to the surface shape of the object under measurement, causes each probe to scan along the surface of the object under measurement to measure the surface shape of the object based on vertical displacement of each probe. The control part is constructed so that the first probe 1a is caused to measure the entire surface shape of the object under measurement, thereafter positions needing fine measurement are estimated, and the second probe 2a is caused to measure the surface shape of the estimated positions needing the fine measurement. COPYRIGHT: (C)2005,JPO&NCIPI
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