发明名称 METHOD FOR MANUFACTURING OPTICAL ELEMENT MOUNTING SUBSTRATE AND OPTICAL ELEMENT MOUNTING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To easily manufacture a configuration with stable high reliability even during operation of a device using an optical element mounting substrate such as a laser beam emission device. SOLUTION: The substrates of a two-layer structure are used, a through hole is provided on one substrate, and the other substrate surface is made a mounting face of an optical component. Furthermore, a reference marker is provided on a wafer previously provided with an optical component mounting positioning marker, and highly precise positioning joint of a wafer level is performed on the basis thereof. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005202082(A) 申请公布日期 2005.07.28
申请号 JP20040007443 申请日期 2004.01.15
申请人 HITACHI LTD 发明人 AKASHI TERUHISA;TAKEMORI HIDEAKI;HIGASHIYAMA MASASHI;HIROSE KAZUHIRO;SEKI MASATOSHI
分类号 G02B6/42;H01S5/022;(IPC1-7):G02B6/42 主分类号 G02B6/42
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