| 摘要 |
PROBLEM TO BE SOLVED: To correctly and precisely detect characteristics of a scanning optical system by eliminating error factors regardless of the scanning optical system. SOLUTION: The relative height detector part 64 detects the relative height H(x, z), the relative height map formation part 65 forms the relative height map from the coordinate of the position of measurement and the relative height H(x, z), the measurement height detection part 66 acquires the two-dimensional light amount distribution data from a two-dimensioned CCD 41 and detects the measurement height Y(x, z), the measurement height map formation part 67 forms the measurement height map from the coordinate of the measurement position, and the measurement height Y(x, z), the correction map formation part 68 forms the correction height map by detecting the correction height h(x, z) based on the relative height map and measurement height map, and the scanning line characteristic derivation part 63 detects the inclination and bending of the scanning line at the designed focus point or light sensing body (z=z<SB>1</SB>) of the scanning optical system based on the correction height map. COPYRIGHT: (C)2005,JPO&NCIPI
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