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发明名称
Verfahren zur Herstellung von Justiermarken auf Halbleiterscheiben
摘要
申请公布号
DE10310716(B4)
申请公布日期
2005.07.28
申请号
DE2003110716
申请日期
2003.03.10
申请人
INFINEON TECHNOLOGIES AG
发明人
OFFENBERG, DIRK;BIEMER, JUSTIN;BOUISSOU, AUDE;DOW, TIM;NOTZ, REINER;PLAGMANN, JOERN;RUDNICK, WOLFRAM;SCHEINBACHER, GUENTHER;SPINDLER, OSWALD;WITTMANN, REINHARD
分类号
H01L23/544;(IPC1-7):H01L23/544
主分类号
H01L23/544
代理机构
代理人
主权项
地址
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