DEVICE AND METHOD FOR DECIDING PROCESS CONDITIONS, DEVICE AND METHOD FOR DECIDING EXPOSURE CONDITIONS AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a process conditions deciding device which supplements a shortage of historical data required for feedback, while suppressing an impact made by differences between a plurality of processing equipment and processing members on a decision of process conditions. SOLUTION: The process conditions deciding device includes historical data retaining portion 112 which stores the historical data of already processed lots; a retaining portion 113 of equipment affinity information which stores an affinity between the processing equipment; a retaining portion 114 of reticle affinity information which stores an affinity between the processing members; a data acquisition portion 123 which acquires the historical data of the already processed lots using the processing equipment and the processing members to be used for processing unprocessed lots, and acquires the historical data of the already processed lots which are processed in combination where either of the processing equipment and the processing members to be used for the unprocessed lots is identical but the other is better in affinity; and a conditions computing portion 124 which decides the process conditions based on the historical data. COPYRIGHT: (C)2005,JPO&NCIPI