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发明名称
PHOTOMASK STRUCTURE FOR PREVENTING STATIC ELECTRICITY
摘要
申请公布号
SG112876(A1)
申请公布日期
2005.07.28
申请号
SG20030001645
申请日期
2003.03.13
申请人
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
发明人
TIEN CHI, WU;KOU-CHOU CHEN;HUAI-JEN, HSU;GEORGE HUANG
分类号
G03F1/14;H01L23/60;(IPC1-7):G03F1/14
主分类号
G03F1/14
代理机构
代理人
主权项
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