| 摘要 |
A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P 1 and P 2 arranged into alignment along an expanding/shrinking direction. Both ends of the piezoelectric element P 1 , facing in the expanding/shrinking direction, are fixed to a base member and a movable member, respectively. The other piezoelectric element P 2 is fixed to the base member only at one end. A gap L is formed between the piezoelectric element P 2 and the movable member. Where expanding displacement amounts of the piezoelectric elements P 1 and P 2 are a 1 and a 2 , respectively, voltage applied to the piezoelectric elements P 1 and P 2 is so controlled to satisfy an equation, a 1 +a 2 =a>=L. It is possible to position the movable member at a position within a maximum stroke a in the nano-order. The driving units may be arranged in the orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.
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