APPARATUS OF CONNECTING SENSOR CABLE FOR LOAD LOCK CHAMBER,申请号KR20030006976-传众专利搜索

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发明名称	APPARATUS OF CONNECTING SENSOR CABLE FOR LOAD LOCK CHAMBER
摘要
申请公布号	KR100503383(B1)	申请公布日期	2005.07.26
申请号	KR20030006976	申请日期	2003.02.04
申请人		发明人
分类号	H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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