发明名称 |
Exposure device and method of fabricating liquid crystal display panel using the same |
摘要 |
An exposure device includes a light irradiator for irradiating light, a mask having a pattern to be formed on a substrate, the mask having a size larger than at least two display panel areas positioned on the substrate, and at least two vacuum pads positioned along sides of the mask for affixing the mask over the substrate.
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申请公布号 |
US6921628(B2) |
申请公布日期 |
2005.07.26 |
申请号 |
US20020281986 |
申请日期 |
2002.10.29 |
申请人 |
LG. PHILIPS LCD CO., LTD. |
发明人 |
SHIN JOONG SUP |
分类号 |
H01L21/027;G03F7/00;G03F7/20;(IPC1-7):G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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