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发明名称
HEATING APPARATUS
摘要
申请公布号
KR100503544(B1)
申请公布日期
2005.07.25
申请号
KR20020070990
申请日期
2002.11.15
申请人
发明人
分类号
H01L21/324;H05B6/10;C23C16/46;H01L21/205;H05B6/02;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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