| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device capable of stably supplying a target substance to a laser beam irradiation region by preventing a nozzle form clogged by a substance solidified as the target substance is cooled and by stabilizing the injecting direction of the target substance. <P>SOLUTION: This light source device is equipped with a target substance supply part 3, a cooling part 8 to liquefy the gaseous target substance by cooling it, a nozzle 9 to inject the liquefied target substance, a laser part 1 to generate plasma by irradiating a laser beam to the target substance injected from the nozzle, a condensing optical system 10, a purge gas supply part 17 to once supply a purge gas having a freezing point lower than the boiling point of the target substance to a vacuum chamber in advance of the supply of the target, and a control part 24 to control the cooling part so that the temperature of the target substance liquefied by the cooling part becomes higher than the freezing point of the purge gas. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
