| 摘要 |
<P>PROBLEM TO BE SOLVED: To evenly distribute the densities of activated species by properly disposing jet nozzles. <P>SOLUTION: A plurality of the jet nozzles 50, 51 are disposed opposite to each other, on both sides of an airtight vessel 20, and a medium gas each jetted from these jet nozzles 50, 51 is allowed to flow toward the central section of the vessel 20, to uniformly distribute the densities of the activated species in the vessel 20 generated by plasmas 53, 54. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
