ELONGATE VACUUM SYSTEM FOR COATING ONE OR BOTH SIDES OF A FLAT SUBSTRATE

摘要

The invention relates to an elongate vacuum system for coating one or both sides of a flat substrate which can be displaced by said system. Said vacuum system comprises at least one magnetron provided with a magnetron surrounding area and is subdivided into successive compartments in the direction of transportation of the substrate by closeable separating walls comprising suction openings. The compartments can be evacuated either directly by means of a vacuum end provided on the compartment or indirectly via a suction opening in the separating wall. At least one compartment comprises an upper partial compartment which is arranged above the substrate, said partial compartment comprising, in at least one of the outer walls thereof, a closeable upper opening. The aim of the invention is to produce an elongate coating system which is flexible to use according to the requirements of various one and two-sided coating processes and to carrying out the processes within the system and said system ensures a stable, differential and process-optimised sputter atmosphere. Said aim is achieved by virtue of the fact that, at least in one of the upper partial compartments, horizontal and/or vertical elements can be mounted in order to subdivide the upper partial compartments into several sections.