发明名称 |
Handling a dielectric substrate and electrically conducting mask, comprises applying the mask to the substrate and holding it in place electrostatically or magnetically |
摘要 |
Process for handling a dielectric substrate (3) and an electrically conducting mask (4), comprises applying the mask to the substrate. The mask is held in place by electrostatic or magnetic force produced by the substrate holder (2). The latter is located on a support surface (2'). The mask holder (1) is located under the upper carrier. |
申请公布号 |
DE10360106(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
DE2003160106 |
申请日期 |
2003.12.20 |
申请人 |
AIXTRON AG |
发明人 |
STRZYZEWSKI, PIOTR;STRAUCH, GERHARD KARL |
分类号 |
C23C14/04;G03F1/00 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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