| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that the interference fringe spacing s and the interference region width W, which are important parameter in the interferometer using an electron beam biprism, could not be controlled mutually independently. SOLUTION: By using two electron beam biprisms in two stages in the optical axis direction, not only the Fresnel diffraction can be avoided, but also the interference fringe spacing s and the interference region width W are independently controlled by controlling the respective electrode voltage of the electron beam biprism. COPYRIGHT: (C)2005,JPO&NCIPI
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