发明名称 Imprint embossing system
摘要 Imprint embossing system. In one embodiment, the system includes a frame, a holder plate to receive a substrate, and at least two fingers to secure the substrate within the holder plate. The fingers maintain a precise position of the substrate within the holder plate.
申请公布号 US2005155554(A1) 申请公布日期 2005.07.21
申请号 US20040761678 申请日期 2004.01.20
申请人 SAITO TOSHIYUKI M. 发明人 SAITO TOSHIYUKI M.
分类号 G11B5/84;C23C16/00;G11B5/86;G11B7/26;H01L21/68;(IPC1-7):C23C16/00 主分类号 G11B5/84
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