发明名称 |
NANOMACHINED AND MICROMACHINED ELECTRODES FOR ELECTROCHEMICAL DEVICES |
摘要 |
A nanomachined and micromachined electrode (10) is disclosed that is produced by providing a layer of aluminum (11) positioned upon a conductive substrate (12), anodizing the layer of aluminum to produce a layer of aluminum oxide (13) having an array of pores (14), depositing a sacrificial metal (17) within the pores of the aluminum oxide layer, etching the aluminum oxide layer so as to leave an array of sacrificial metal rods (18), depositing a layer of electrode material (19) between the array of sacrificial metal rods, and etching the sacrificial metal rods so that a layer of copper remains having an array of pores (20) where the sacrificial metal rods had existed. The layer of copper is the electrode (10). |
申请公布号 |
WO2005017971(A3) |
申请公布日期 |
2005.07.21 |
申请号 |
WO2004US26534 |
申请日期 |
2004.08.16 |
申请人 |
JOHNSON RESEARCH & DEVELOPMENT COMPANY, INC. |
发明人 |
BABIC, DAVORIN;BAXLEY, JOHN, M.;BROWNE, PAUL, D. |
分类号 |
C25B11/00;C25B11/04;C25D1/00;C25D1/08;C25D3/38;C25D3/66;C25D5/10;C25D5/34;C25D5/48;C25D11/04;C25D11/06;C25D17/10;C25D17/12;H01L |
主分类号 |
C25B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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