| 摘要 |
An actuator structure 5 is arranged to generate an electrostatic force between electrodes 7, 8 to move the electrode 7 relative to the electrode 8. The electrode 7 has a stationary portion 10 fixed to an upper surface of a substrate, a connection portion 11 supported on this stationary portion 10, and a comb portion 12 supported on the connection portion 11. The electrode 8 has a stationary portion 15 fixed to the upper surface of the substrate, and a comb portion 17 coupled trough a connection portion 16 to the stationary portion 15. The comb portion 17 is opposed to the comb portion 12.
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