发明名称 Method of fabricating thin film transistor with multiple gates using super grain silicon crystallization
摘要 A method of fabricating a thin film transistor with multiple gates using a SGS process which is capable of materializing multiple gates without increasing dimensions and a method thereof. The thin film transistor has a thin film transistor using super grain silicon (SGS) crystallization comprising a semiconductor layer formed on an insulating substrate in a zigzag shape, and a gate electrode formed so that it intersects with the semiconductor layer, wherein the semiconductor layer gas a high-angle grain boundary at apart which does not cross the gate electrode.
申请公布号 US2005158928(A1) 申请公布日期 2005.07.21
申请号 US20040023637 申请日期 2004.12.29
申请人 发明人 SO WOO-YOUNG
分类号 H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/786;(IPC1-7):H01L21/00;H01L21/331 主分类号 H01L21/20
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