Deformable mirror device (DMD) spatial light modulator (SLM) with dual counter-opposed deflection electrodes

摘要

A deformable mirror device spatial light modulator employs a pair of substrates each having formed therein a deflection electrode. The pair of deflection electrodes is separated by a gap having positioned therein a deformable mirror which is registered with both of the pair of deflection electrodes. Appropriate magnitudes and polarities of voltages are applied to the pair of deflection electrodes and the deformable mirror such as to deflect the deformable mirror with enhanced deflection control.