| 发明名称 |
Organic polymer film, method for producing the same and semiconductor device using the same |
| 摘要 |
An organic polymer film of low dielectric constant and high heating resistance which is applicable as insulating layers of semiconductor devices, a method of manufacturing the organic polymer film, and a semiconductor device using the organic polymer film.
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| 申请公布号 |
US2005156287(A1) |
申请公布日期 |
2005.07.21 |
| 申请号 |
US20040484893 |
申请日期 |
2004.10.27 |
| 申请人 |
TAKAHASHI AKIO;SATSU YUICHI;NAKAI HARUKAZU;NAKAI YOSHIKO;KARDASH IGOR Y.;PEBALK ANDREI V.;CHVALUN SERGEI N.;MAILYAN KEAREN A. |
发明人 |
TAKAHASHI AKIO;SATSU YUICHI;NAKAI HARUKAZU;NAKAI YOSHIKO;KARDASH IGOR Y.;PEBALK ANDREI V.;CHVALUN SERGEI N.;MAILYAN KEAREN A. |
| 分类号 |
C08G61/02;C08J5/18;H01L21/312;H01L21/76;H01L49/02;(IPC1-7):H01L21/302;H01L23/48 |
主分类号 |
C08G61/02 |
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