| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and inspection method for a transparent electrode by seeing. SOLUTION: The inspection device 10 is provided with a light source 14 emitting light 16 irradiated on a substrate 12, a filter 18 transmitting only light 16 of wavelength with different reflectivity in a plurality of layers including the transparent electrode and reflectivity in a layer not including the transparent electrode, and a camera 20 for receiving light 16 having passed the filter 18. In the case of a large reflectivity ratio, ideally in the case of maximum one, the transparent electrode can be photographed. COPYRIGHT: (C)2005,JPO&NCIPI
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