发明名称 Semiconductor device, method of manufacturing same and method of designing same
摘要 A partial oxide film ( 31 ) with well regions formed therebeneath isolates transistor formation regions in an SOI layer ( 3 ) from each other. A p-type well region ( 11 ) is formed beneath part of the partial oxide film ( 31 ) which isolates NMOS transistors from each other, and an n-type well region ( 12 ) is formed beneath part of the partial oxide film ( 31 ) which isolates PMOS transistors from each other. The p-type well region ( 11 ) and the n-type well region ( 12 ) are formed in side-by-side relation beneath part of the partial oxide film ( 31 ) which provides isolation between the NMOS and PMOS transistors. A body region is in contact with the well region ( 11 ) adjacent thereto. An interconnect layer formed on an interlayer insulation film ( 4 ) is electrically connected to the body region through a body contact provided in the interlayer insulation film ( 4 ). A semiconductor device having an SOI structure reduces a floating-substrate effect.
申请公布号 US2005156242(A1) 申请公布日期 2005.07.21
申请号 US20050034938 申请日期 2005.01.14
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMAGUCHI YASUO;MAEGAWA SHIGETO;IPPOSHI TAKASHI;IWAMATSU TOSHIAKI;MAEDA SHIGENOBU;HIRANO YUUICHI;MATSUMOTO TAKUJI;MIYAMOTO SHOICHI
分类号 H01L21/762;H01L21/331;H01L21/8238;H01L21/84;H01L27/01;H01L27/08;H01L27/092;H01L27/12;H01L29/786;H01L31/00;(IPC1-7):H01L27/01 主分类号 H01L21/762
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