| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet light washing apparatus which can prevent a treating unevenness, etc. from occurring by adhering a white powder to a lamp housing by accelerating the treating speed of a material to be treated. SOLUTION: An open housing 33 in which the whole ultraviolet lamp 32 group is surrounded from four peripheries, is provided in the lamp housing 30. A porous gas diffusing plate 35 in which many holes of 1-3 mm are formed on the ceiling of the open housing 33, such as, for example, a stainless steel plate, is disposed on the ceiling of the open housing 33. Clean nitrogen gas (inert gas) is supplied from here, the entirety from the periphery of the ultraviolet lamp 32 to the ultraviolet light emitting space X for emitting the light onto a work W is fully filled with the nitrogen, and is maintained in an inert gas atmosphere where an oxygen does not almost exist. COPYRIGHT: (C)2005,JPO&NCIPI
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