| 摘要 |
The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus has a memory for storing image data obtained by scanning a specimen with the beam. A four-sided region-blurring device reads the image data from the memory and blurs regions close to the four sides of an image represented by the image data. A probe profile extractor extracts the probe profile from the image that has been blurred as mentioned above. A correction amount-calculating unit performs extraction of amounts of features, calculations of aberrations. A correcting unit corrects the aberration corrector.
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