发明名称 ACTUATOR COMPRISING AN INTERNAL CONNECTION ELECTRODE, AND METHOD FOR PRODUCING ONE SUCH ACTUATOR
摘要 The invention relates to an actuator (1) comprising at least one connection electrode (5.1, 5.2) for electrically controlling said actuator (1). According to the invention, the connection electrode (5.1, 5.2) is arranged at least partially inside the actuator (1). The invention also relates to a method for producing one such actuator (1).
申请公布号 WO2005067070(A1) 申请公布日期 2005.07.21
申请号 WO2004EP53612 申请日期 2004.12.20
申请人 SIEMENS AKTIENGESELLSCHAFT;ALBERT, ROLAND 发明人 ALBERT, ROLAND
分类号 H01L41/047;H01L41/083;H01L41/273 主分类号 H01L41/047
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