发明名称 |
ACTUATOR COMPRISING AN INTERNAL CONNECTION ELECTRODE, AND METHOD FOR PRODUCING ONE SUCH ACTUATOR |
摘要 |
The invention relates to an actuator (1) comprising at least one connection electrode (5.1, 5.2) for electrically controlling said actuator (1). According to the invention, the connection electrode (5.1, 5.2) is arranged at least partially inside the actuator (1). The invention also relates to a method for producing one such actuator (1). |
申请公布号 |
WO2005067070(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
WO2004EP53612 |
申请日期 |
2004.12.20 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;ALBERT, ROLAND |
发明人 |
ALBERT, ROLAND |
分类号 |
H01L41/047;H01L41/083;H01L41/273 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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