LASER PROCESSING METHOD AND DEVICE

摘要

Displacement of a laser beam concentration point is reduced as much as possible, and simultaneously, laser processing is efficiently performed. A laser processing method has displacement acquiring steps (S07-S11). In the steps, a distance measuring laser beam for measuring the displacement of a surface (S1) of an object (S) to be processed is collected by a lens and irradiated to the object (S), and the displacement of a surface along a planned cutting line is acquired while the beam reflected by a main surface in correspondence to the irradiation is being detected (45). While the distance between an objective lens (42) for processing and the surface (S1) is being adjusted based on the displacement acquired in the displacement acquiring steps, the objective lens (42) for processing and the object (S) to be processed are relatively moved along the main surface to form a reformed region along the planned cutting line (P).