Projection objective having adjacently mounted aspheric lens surfaces

摘要

A projection objective has at least five lens groups (G 1 to G 5 ) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere ( 21 ) is mounted at a minimum distance from an image plane ( 0 ') which is greater than the maximum lens diameter (D 2 ) of the objective.