| 发明名称 |
Method of manufacturing a WN contact plug |
| 摘要 |
WF<SUB>6 </SUB>is used as a source gas of tungsten, and NH<SUB>3 </SUB>is used as a source gas of nitrogen. The partial pressure of WF<SUB>6 </SUB>is set to be higher than that of NH<SUB>3</SUB>. The substrate temperature is set to about 400° C. to 450° C. Tungsten nitride is deposited and then heated, to form a contact plug ( 106 ).
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| 申请公布号 |
US6919268(B1) |
申请公布日期 |
2005.07.19 |
| 申请号 |
US20030451598 |
申请日期 |
2003.06.24 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
YAMASAKI HIDEAKI;KAWANO YUMIKO |
| 分类号 |
H01L21/285;H01L21/768;(IPC1-7):H01L21/476 |
主分类号 |
H01L21/285 |
| 代理机构 |
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