Self-test circuit and method for testing a microsensor

摘要

A test circuit and method provide testing of a capacitive type microsensor. The method includes applying a first signal having a first voltage potential to an input of a microsensor during a non-test operating mode. The method also includes applying a second voltage signal having a second voltage potential different than the first voltage potential during a test mode. The second voltage potential induces a net differential electrostatic force in the microsensor. The method further includes the steps of monitoring an output signal of the microsensor, comparing the output signal to an expected value when the microsensor is in the test mode, and determining if the microsensor is functioning properly as a function of the comparison.