Polymer, Resist Composition and Patterning Process,申请号KR20000067373-传众专利搜索

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发明名称	Polymer, Resist Composition and Patterning Process
摘要
申请公布号	KR100501600(B1)	申请公布日期	2005.07.18
申请号	KR20000067373	申请日期	2000.11.14
申请人		发明人
分类号	G03F7/027;G03F7/004;G03F7/039;(IPC1-7):G03F7/027	主分类号	G03F7/027
代理机构		代理人
主权项
地址

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