发明名称 |
APPARATUS FOR HOLDING OPTICAL ELEMENT, BARREL, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD |
摘要 |
<p>A holding apparatus (38) for holding an optical element (37) at a controlled position and attitude. The optical element (37) is held at an inner ring (43) by a piezo housing (54). A piezo element (65) is isolated from the optical element (37). When the piezo element (65) elongates and contracts, a displacement section (70) is displaced in a plane perpendicular to the optical axis of the optical element while being guided by a parallel link section (71). A transmission link section (72) converts the direction of the displacement of the optical element (37) to transmit the result to a part of the inner ring (43).</p> |
申请公布号 |
WO2005064382(A1) |
申请公布日期 |
2005.07.14 |
申请号 |
WO2004JP19265 |
申请日期 |
2004.12.22 |
申请人 |
NIKON CORPORATION;SHIBAZAKI, YUICHI |
发明人 |
SHIBAZAKI, YUICHI |
分类号 |
G02B7/00;G02B7/02;G03F7/20;H01L21/027;(IPC1-7):G02B7/02 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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