| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly control the temperature states of a plurality of apparatuses, different in temperature, as device constitution is prevented from being complicated. <P>SOLUTION: In case a temperature T_DV or a temperature T_PDU of a process development unit (PDU) is increased to temperature higher than a given temperature #T (or in case the temperature T_PDU is increased to temperature higher than the given temperature #T), first of all a cooling fan is operated to cool a radiator. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
