| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary deflection device which inspects the rotary deflection of a motor with high precision, by solving the problem that the vibration produced by the rotation of the motor of an object to be inspected spreads to the sensing part and the like which detects the deflection, so that an error is produced in the measurement by the sensing part. SOLUTION: When a spindle motor 1 is rotated, the vibration of the spindle motor 1 is transmitted through a base 1 and makes a sensor 3 vibrate. The vibration of the sensor 3 is detected by a sensor 4, and the vibration of the sensor 4 can be monitored by using a wave indication means, such as an oscilloscope. Further, on the basis of the vibration value acquired from sensor 4, the rotary deflection value is obtained by removing the influence of the vibration of the sensor 3. COPYRIGHT: (C)2005,JPO&NCIPI
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