发明名称 Vaporizing arrangement for sublimating materials
摘要 The invention relates to a vaporizing arrangement. It preferably should be utilized in vacuum coating systems. The vaporizing arrangement comprises a two-part housing, namely a pan ( 3 ) and an associated lid ( 8 ), which is provided with the exit slot ( 16 ) for the material to be vaporized. Extending transversely above the pan ( 3 ) are several heating rods ( 5 ) which can be contacted on the outside and the radiant output of which heats the material to be vaporized, for example zinc sulfide, and causes it to vaporize. The arrangement is relatively simply constructed, can be easily disassembled, cleaned, and reassembled and can, if several arrangements of this type are combined, also be used for the uniform coating of very wide films.
申请公布号 US2005150975(A1) 申请公布日期 2005.07.14
申请号 US20040001528 申请日期 2004.12.01
申请人 KLEMM GUNTHER;HERZOG JENS;LOTZ HANS-GEORG 发明人 KLEMM GUNTHER;HERZOG JENS;LOTZ HANS-GEORG
分类号 C23C14/26;C23C14/24;C23C14/28;(IPC1-7):B05B1/24;B05C5/04;F25B47/00 主分类号 C23C14/26
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