| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method, a method of providing an alignment mark and to provide a device manufacturing method. SOLUTION: According to the measuring method by one embodiment, the relative mark between the provisional alignment mark of one surface in a substrate and the alignment mark of the other surface thereof is determined, and the provisional alignment mark is removed. Prior to the removal of the provisional alignment mark, the relative position between the provisional alignment mark and the other mark on the same surface of the substrate can be determined. The provisional alignment mark, for example, can be formed on an oxide layer on the substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
