发明名称 PROVE HEAD AND PROJECTOR HEAD OF OPTOELECTRONIC SENSOR, AND PROBE HEAD OF WAFER-DETECTING SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a probe head of optoelectronic sensor and others, capable of irradiating parallel rays in two orthogonal directions having different beam width, by utilizing effectively the light emitted radially from a projector. SOLUTION: The radial light 2, emitted from a projector 1, is deflected to parallel light, by the first projecting lens 3, in the narrower direction (the right and left directions on the space of Figure (B)) of the two mutually orthogonal directions and perpendicular to the optical axis. The light 4 which is parallel light in one direction and radial light in the wider direction (the right and left directions on the space of Figure (A)) is deflected to parallel light, even in the aforementioned wider direction by the second projecting lens 5 as shown in Figure (B). Thus, irradiating is possible of parallel light 6, of which beam width is differ in the two mutually orthogonal directions, into the prescribed region. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005189197(A) 申请公布日期 2005.07.14
申请号 JP20030433793 申请日期 2003.12.26
申请人 SUNX LTD 发明人 OTSUKA KAZUHIRO
分类号 G01B11/02;G01J1/02;G01V8/14;(IPC1-7):G01V8/14 主分类号 G01B11/02
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