| 发明名称 |
Workpiece alignment assembly |
| 摘要 |
A workpiece alignment assembly. The assembly may include an embossing foil, a nest having a gas-bearing surface to receive a substrate, and piezo actuators disposed near the gas-bearing nest. In one embodiment, the piezo actuators center the substrate relative to the embossing foil.
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| 申请公布号 |
US2005150862(A1) |
申请公布日期 |
2005.07.14 |
| 申请号 |
US20040757794 |
申请日期 |
2004.01.13 |
| 申请人 |
HARPER BRUCE M.;BAJOREK CHRISTOPHER H. |
发明人 |
HARPER BRUCE M.;BAJOREK CHRISTOPHER H. |
| 分类号 |
B44C1/22;G11B5/84;H01L21/68;H01L21/76;(IPC1-7):B44C1/22 |
主分类号 |
B44C1/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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