发明名称 SEMICONDUCTOR DEVICE AND INSPECTION METHOD OF THE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To precisely measure the frequency characteristics of a circuit to be measured inside a chip, even when the output current capacity of the circuit to be measured is small. SOLUTION: This device is configured to arrange an output buffer 5 and a pad 6 within a scribe lane 2, connect an input part 15 of the output buffer 5 to the output of the circuit 3 to be measured via a first fuse 4, connect a first power source 8 of the output buffer 5 to a first power source 7 of the chip 1 via a second fuse 9, and connect a second power source 11 of the output buffer 5 to a second power source 10 of the chip 1. According to this configuration, the frequency characteristics of the circuit 3 to be measured can be improved by the output buffer 5, and this device further comprises a circuit 12 for cutting the first fuse 4 and the second fuse 9, after the inspection of frequency characteristics arranged within the scribe lane 2. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005188938(A) 申请公布日期 2005.07.14
申请号 JP20030426833 申请日期 2003.12.24
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NOZAKI KIYOTAKA
分类号 G01R31/28;H01L21/66;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):G01R31/28 主分类号 G01R31/28
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