SPIN-COATING DEVICE AND METHOD OF PRODUCING DISK-LIKE RECORDING MEDIUM

摘要

A spin-coating device where a mask that is used when a disk is spin-coated can be prevented from being damaged. Specifically, the device is structured as follows. First, a mask is placed on a disk member that is placed on a spinner and is then spin-coated. Immediately after that, processings of cleaning, rinsing, and drying are continuously applied to the single mask removed from the disk member, and the mask after processings is continuously sent to the next spin-coating process. <IMAGE>