发明名称 Self-aligned magnetic clad write line and its method of formation
摘要 A self-aligned magnetic clad bit line structure ( 274 ) for a magnetic memory element ( 240 a) and its method of formation are disclosed, wherein the self-aligned magnetic clad bit line structure ( 274 ) extends within a trench ( 258 ) and includes a conductive material ( 264 ), magnetic cladding sidewalls ( 262 ) and a magnetic cladding cap ( 252 ). The magnetic cladding sidewalls ( 262 ) at least partially surround the conductive material ( 264 ) and the magnetic cladding cap ( 252 ) is substantially recessed within the trench with respect to the top of the trench.
申请公布号 US6916669(B2) 申请公布日期 2005.07.12
申请号 US20030378348 申请日期 2003.03.03
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 JONES ROBERT E.;BARRON CAROLE C.;LUCKOWSKI ERIC D.;MELNICK BRADLEY M.
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L43/08;(IPC1-7):H01L21/00;H01L21/20 主分类号 H01L27/105
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